00702nam a2200217Ia 4500 CTU_104016 210402s9999 xx 000 0 und d 156.67 621.38152 O36 Ohring, Milton Materials science of thin films : deposition and structure Milton Ohring San Diego, CA Academic Press 2002 This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapte Thin films,Màng mỏng Huỳnh Mai Trung tâm Học liệu Trường Đại học Cần Thơ