01049nam a2200217Ia 4500 CTU_124115 210402s9999 xx 000 0 und d 1279000 621.38152 M466 May, Gary S. Fundamentals of semiconductor manufacturing and process control Gary S. May, Costas J. Spanos Hoboken, N.J. Wiley-Interscience 2006 Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Semiconductors,Process control,Integrated circuits Design and construction,Statistical methods,Design and construction Minh Trung tâm Học liệu Trường Đại học Cần Thơ