rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamentals of semiconductor manufacturing and process control
  title info: title
  name:
    name part: May, Gary S.
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: xx
    place:
      place term: Hoboken, N.J
    publisher: Wiley-Interscience
    date issued: 2006
    date issued: 9999
    issuance: monographic
  language:
    language term: und
  physical description:
    form: print
  abstract: Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.
  note: Gary S. May, Costas J. Spanos
  subject:
    topic: Semiconductors,Process control,Integrated circuits
  subject:
    topic: Design and construction,Statistical methods,Design and construction
  classification: 621.38152
  classification: M466
  record info:
    record creation date: 210402
    record identifier: CTU_124115