Plasma-aided nanofabrication : from plasma sources to nanoassembly
This monograph covers most essential things an advanced researcher needs to know attempting to fabricate exotic nanostructures and intricate nano-arrays in low-temperature plasma environments. In an easy-to-follow and systematic way, the book reveals the state-of-the art "know-hows" gained...
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Weinheim
Wiley-VCH
2007
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