01114nam a2200217Ia 4500 CTU_133719 210402s9999 xx 000 0 und d 83.49 620.5 B146 Baglio, Salvatore Scaling issues and design of MEMS Salvatore Baglio, Salvatore Castorina, Nicol Savalli Chichester, England John Wiley & Sons 2007 Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science. Microelectromechanical systems,Hệ MEMS Design and construction,Thiết kế và xây dựng Trọng Hiếu Trung tâm Học liệu Trường Đại học Cần Thơ