01016nam a2200217Ia 4500 CTU_152275 210402s9999 xx 000 0 und d 116.25 621.38152 M466 May, Gary S. Fundamentals of semiconductor fabrication Gary S. May, Simon M. Sze New York Wiley 2004 This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film depositio Semiconductors,Bán dẫn Design and construction,Thiết kế xây dựng Phương Kiều Trung tâm Học liệu Trường Đại học Cần Thơ