01064nam a2200217Ia 4500 CTU_164292 210402s9999 xx 000 0 und d 193.95 621.395 T926 Tung, Chih-Hang ULSI semiconductor technology atlas Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu Hoboken, N.J. John Wiley & Sons 2003 Ultra Large Scale Integration (ULSI)_refers to chips with_more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems. Integrated circuits,Electron microscopy,Mạch tích hợp,Kính hiển vi điện tử Ultra large scale integration,Ultra tổ hợp quy mô lớn Trọng Hải Trung tâm Học liệu Trường Đại học Cần Thơ