01169nam a2200241Ia 4500 CTU_237205 210402s9999 xx 000 0 und d 671.7 M444 Mattox, D. M. Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control Donald M. Mattox. Westwood, N.J. Noyes Publications 1998 This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. Vật lý màng mỏng TN399 Công nghệ mạ chân không,Physical vapor deposition Handbooks, manuals, etc. Tuyến Trung tâm Học liệu Trường Đại học Cần Thơ