(2002). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. Norwich, N.Y: Noyes Publications.
Chicago-стиль цитированияHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
MLA-цитированиеHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
Предупреждение: эти цитированмия не могут быть всегда правильны на 100%.