(2002). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. Norwich, N.Y: Noyes Publications.
Chicago ZitierstilHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
MLA ZitierstilHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.