(2002). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. Norwich, N.Y: Noyes Publications.
Chicago Stili AlıntıHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
MLA AlıntıHandbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment, and Applications. Norwich, N.Y: Noyes Publications, 2002.
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