01131nam a2200229Ia 4500 CTU_238613 210402s9999 xx 000 0 und d 530.44 L716 Lieberman, M. A. Principles of plasma discharges and materials processing Michael A. Lieberman, Allan J. Lichtenberg. Hoboken, N.J. Wiley-Interscience 2005 The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. Vật lý plasma và ứng dụng SP252 Ứng dụng công nghiệp,Plasma chemistry Hóa học plasma,Industrial applications. Tuyến Trung tâm Học liệu Trường Đại học Cần Thơ