Hong Xiao. (2001). Introduction to semiconductor manufacturing technology. Upper Saddle River, NJ: Prentice-Hall.
Chicago ZitierstilHong Xiao. Introduction to Semiconductor Manufacturing Technology. Upper Saddle River, NJ: Prentice-Hall, 2001.
MLA ZitierstilHong Xiao. Introduction to Semiconductor Manufacturing Technology. Upper Saddle River, NJ: Prentice-Hall, 2001.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.