Stuart, R. V. (1983). Vacuum technology, thin films, and sputtering. Orlando: Academic Press.
Chicago Stili AlıntıStuart, R. V. Vacuum Technology, Thin Films, and Sputtering. Orlando: Academic Press, 1983.
MLA AlıntıStuart, R. V. Vacuum Technology, Thin Films, and Sputtering. Orlando: Academic Press, 1983.
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