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00441nam a2200157Ia 4500001001000000008004100010082001200051082000900063245004300072260001300115260003500128260000900163650003000172904001000202980007100212 CTU_85192 210402s9999 xx 000 0 und d a621.381 bB311 4 aThe basics of sputtering third edition aNew York bMaterials Research Corporation c1958 aMicroelectronics industry iNăm aTrung tâm Học liệu Trường Đại học Cần Thơ