(1992). Beam technologies for integrated processing: Report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. Washington: National Academy Press.
Chicago Style CitationBeam Technologies for Integrated Processing: Report of the Committee On Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission On Engineering and Technical Systems, National Research Council. Washington: National Academy Press, 1992.
Cita MLABeam Technologies for Integrated Processing: Report of the Committee On Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission On Engineering and Technical Systems, National Research Council. Washington: National Academy Press, 1992.