http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Characterization and spectroscopy of thin films
v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films.
Includes bibliographical references and indexes.