01410nam a2200421 4500 DLU070058143 ##20070122 ##030811s2004 nyua b 001 0 eng d 2003276248 GBA3-Y5182 0471232793 (OCoLC)ocm51838570 UKM UKM HKP FUG DLC lccopycat TK7871.85 .M378 2004 621.381 52 MA-G May, Gary S. Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. Wiley international ed. New York : Wiley, c2004. xiii, 305 p. : ill. ; 26 cm. Includes bibliographical references and index. Integrated circuits Design and construction. Semiconductors Design and construction. Sze, S. M., 1936- Table of contents http://www.loc.gov/catdir/toc/wiley032/2003276248.html Contributor biographical information http://www.loc.gov/catdir/bios/wiley044/2003276248.html Publisher description http://www.loc.gov/catdir/description/wiley037/2003276248.html 31/2006 80.500 DLU True Đào Thị Thu Huyền G A SH Thư viện Trường Đại học Đà Lạt