rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry
  name:
    name part: Allen, David T.
  name:
    name part: Dyer, David E.
  name:
    name part: Kenig, George A.
  name:
    name part: Laurent, Jean-Philippe.
  name:
    name part: Murphy, Cynthia F.
  type of resource: text
  origin info:
    issuance: monographic
  language:
    language term: eng
  note: Cynthia F. Murphy ... [et al.].
  subject:
    topic: Electronics industry
  subject:
    topic: Emissions inventory
  subject:
    topic: Energy consumption
  subject:
    topic: Microelectronic fabrication
  subject:
    topic: Pollutant emission
  subject:
    topic: Raw materials
  subject:
    topic: Semiconductor materials
  related item:
    title info:
      title: Environmental Science & Technology
    part:
      text: Vol. 37, no. 23 (December 2003), p. 5373-5382
  record info:
    record content source: DLU
    record change date: ##20091201
    record identifier: DLU090094213
    language of cataloging:
      language term: eng