French, R. H., & Tran, H. V. Immersion lithography: Photomask and wafer-level materials.
Dyfyniad Arddull ChicagoFrench, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
Dyfyniad MLAFrench, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.