French, R. H., & Tran, H. V. Immersion lithography: Photomask and wafer-level materials.
Trích dẫn kiểu ChicagoFrench, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
ציטוט MLAFrench, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
אזהרה: ציטוטים אלה לעיתים לא מדויקים ב 100%.