French, R. H., & Tran, H. V. Immersion lithography: Photomask and wafer-level materials.
シカゴスタイル引用形French, Roger H., , Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
MLA引用形式French, Roger H., , Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
警告: この引用は必ずしも正確ではありません.