French, R. H., & Tran, H. V. Immersion lithography: Photomask and wafer-level materials.
Trích dẫn kiểu ChicagoFrench, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
MLA引文French, Roger H., và Hoang V. Tran. Immersion Lithography: Photomask and Wafer-level Materials.
警告：这些引文格式不一定是100％准确.