rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fabrication and characterization of Ni-Cr alloy thin films for application to precision thin film resistors
  name:
    name part: Lee, Boong-Joo.
    role:
      role term: creator
  name:
    name part: Shin, Paik-Kyun.
  type of resource: text
  origin info:
    issuance: monographic
  language:
    language term: eng
  note: Boong-Joo Lee, Paik-Kyun Shin.
  subject:
    topic: DC magnetron sputtering
  subject:
    topic: Ni-Cr alloy thin films
  subject:
    topic: TCR
  subject:
    topic: Thin film resistor
  related item:
    title info:
      title: Journal of Electrical Engineering & Technology
    part:
      text: Vol. 2, no. 4 (December 2007), p. 525-531
  record info:
    record content source: DLU
    record change date: ##20091201
    record identifier: DLU090098780
    language of cataloging:
      language term: eng