Park, T. G., Han, D. C., & Yang, S. S. The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching.
Chicago Style CitationPark, Tae Gyu., Dong Chul Han, and Sang Sik Yang. The Fabrication of Megasonic Agitated Module (mam) for the Improved Characteristics of Wet Etching.
MLA CitationPark, Tae Gyu., Dong Chul Han, and Sang Sik Yang. The Fabrication of Megasonic Agitated Module (mam) for the Improved Characteristics of Wet Etching.
Warning: These citations may not always be 100% accurate.