APA Citatie

Park, T. G., Han, D. C., & Yang, S. S. The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching.

Chicago Style citaat

Park, Tae Gyu., Dong Chul Han, en Sang Sik Yang. The Fabrication of Megasonic Agitated Module (mam) for the Improved Characteristics of Wet Etching.

MLA citatie

Park, Tae Gyu., Dong Chul Han, en Sang Sik Yang. The Fabrication of Megasonic Agitated Module (mam) for the Improved Characteristics of Wet Etching.