01414nam a2200217Ia 4500 TDMU_24211 210410s9999 xx 000 0 und d 670.28 V500 Vũ, Thị Hạnh Thu Kỹ thuật chế tạo màng mỏng Vũ Thị Hạnh Thu Tp. Hồ Chí Minh Đại học Quốc gia Tp. Hồ Chí Minh 2014 227tr. Bao gồm bảy chương, trình bày về các kỹ thuật chế tạo màng từ pha dung dịch và pha hơi. Bao gồm các phương pháp như mạ điện, sol-gel, lắng đọng hơi hóa học (CVD), lắng đọng lớp nguyên tử (ALD), bốc bay nhiệt, bốc bay chùm điện tử, lắng đọng màng bằng xung laser (PLD), phún xạ diode phẳng, phún xạ magnetron, phún xạ chùm ion, epitaxy chùm phân tử (MBE) và phun nhiệt.... Vật liệu màng mỏng Chế tạo; Kỹ thuật chế tạo vật liệu Vật liệu màng mỏng; Vật lý Trạng thái vật chất Màng mỏng Đại học Quốc gia Tp. Hồ Chí Minh http://lrc.tdmu.edu.vn/opac/search/detail.asp?aID=2&ID=24211 Trung tâm Học liệu Trường Đại học Thủ Dầu Một