Pham, Q. P., & Pham Quoc Phong; Dr. Chao - Chang A. Chen. (2017). Study on diamond dressing for non - uniformity of pad surface topography in CMP process: Student id: D10203803. Taiwan: National Taiwan University of science and Technology.
Citação norma ChicagoPham, Quoc Phong, và Pham Quoc Phong; Dr. Chao - Chang A. Chen. Study On Diamond Dressing for Non - Uniformity of Pad Surface Topography in CMP Process: Student Id: D10203803. Taiwan: National Taiwan University of science and Technology, 2017.
Citação norma MLAPham, Quoc Phong, và Pham Quoc Phong; Dr. Chao - Chang A. Chen. Study On Diamond Dressing for Non - Uniformity of Pad Surface Topography in CMP Process: Student Id: D10203803. Taiwan: National Taiwan University of science and Technology, 2017.