(2010). Multi-wafer rotating MEMS machines: Turbines, generators, and engines. Springer.
Chicago Style CitationMulti-wafer Rotating MEMS Machines: Turbines, Generators, and Engines. Springer, 2010.
Cita MLAMulti-wafer Rotating MEMS Machines: Turbines, Generators, and Engines. Springer, 2010.
Atenció: Aquestes cites poden no estar 100% correctes.