APA Citation

(2010).  Multi-wafer rotating MEMS machines: Turbines, generators, and engines.  Springer.

Chicago Style Citation

 Multi-wafer Rotating MEMS Machines: Turbines, Generators, and Engines.  Springer, 2010.

MLA Citation

 Multi-wafer Rotating MEMS Machines: Turbines, Generators, and Engines.  Springer, 2010.

Warning: These citations may not always be 100% accurate.