Study on Material Properties of Si Thin Films Crystallized on Yttria-Stabilized Zirconia in Solid Phase by Pulsed Laser Annealing
Chapter 1: Introduction; Chapter 2: Theory of Solid-Phase Crystallization (SPC) of an Amorphous Film; Chapter 3: Fabrication Procedures and Evaluation Methods; ...
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| Language: | eng |
| Online Access: | https://dlib.udn.vn/module/chi-tiet-sach?RecordID=1959 |
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| Institutions: | Trung tâm Công nghệ thông tin và Học liệu số, Đại học Đà Nẵng |
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