Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

Autor Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong
Vydáno 2025

Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

Autor Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong, Phan, Minh Truong
Vydáno 2025