Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

von Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong
Veröffentlicht 2025

Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

von Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong, Phan, Minh Truong
Veröffentlicht 2025