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1

Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

par Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong
Publié 2025

Thư viện lưu trữ: Thư viện Trường Đại học Đà Lạt

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2

Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

par Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong, Phan, Minh Truong
Publié 2025

Thư viện lưu trữ: Thư viện Trường Đại học Đà Lạt

Accéder au texte intégral