Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

Yazar: Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong
Baskı/Yayın Bilgisi 2025

Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

Yazar: Nguyen, Chi Cuong, Trinh, Xuan Thang, Lam, Minh Thinh, Vuong, Dinh Duy Phuc, Truong, Huu Ly, Ngo, Vo Ke Thanh, Le, Quoc Cuong, Phan, Minh Truong
Baskı/Yayın Bilgisi 2025