Gilleo, K. (2005). MEMS/MOEMS packaging: Concepts, designs, materials, and processes. New York: Mcgraw-hill.
Dyfyniad Arddull ChicagoGilleo, Ken. MEMS/MOEMS Packaging: Concepts, Designs, Materials, and Processes. New York: Mcgraw-hill, 2005.
Dyfyniad MLAGilleo, Ken. MEMS/MOEMS Packaging: Concepts, Designs, Materials, and Processes. New York: Mcgraw-hill, 2005.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.