MEMS/MOEMS packaging : Concepts, designs, materials, and processes

While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the prote...

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Autor principal: Gilleo, Ken
Format: Llibre
Idioma:Undetermined
Publicat: New York Mcgraw-hill 2005
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