Mattox, D. M. (1998). Handbook of physical vapor deposition (PVD) processing: Film formation, adhesion, surface preparation and contamination control. Westwood, N.J: Noyes Publications.
Chicago Style CitationMattox, D. M. Handbook of Physical Vapor Deposition (PVD) Processing: Film Formation, Adhesion, Surface Preparation and Contamination Control. Westwood, N.J: Noyes Publications, 1998.
MLA CitationMattox, D. M. Handbook of Physical Vapor Deposition (PVD) Processing: Film Formation, Adhesion, Surface Preparation and Contamination Control. Westwood, N.J: Noyes Publications, 1998.
Warning: These citations may not always be 100% accurate.