Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

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Bibliographic Details
Main Author: Mattox, D. M.
Format: Book
Language:Undetermined
Published: Westwood, N.J. Noyes Publications 1998
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Institutions: Trung tâm Học liệu Trường Đại học Cần Thơ