Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

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Bibliografische gegevens
Hoofdauteur: Mattox, D. M.
Formaat: Boek
Taal:Undetermined
Gepubliceerd in: Westwood, N.J. Noyes Publications 1998
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