Liang, H. (2004). Tribology in chemical mechanical planarization. London: Taylor and Francis.
Chicago Style CitationLiang, Hong. Tribology in Chemical Mechanical Planarization. London: Taylor and Francis, 2004.
Cita MLALiang, Hong. Tribology in Chemical Mechanical Planarization. London: Taylor and Francis, 2004.
Atenció: Aquestes cites poden no estar 100% correctes.