Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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Detalhes bibliográficos
Autor principal: Liang, Hong
Formato: Livro
Idioma:Undetermined
Publicado em: London Taylor and Francis 2004
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ