Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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Bibliographic Details
Main Author:	Liang, Hong
Format:	Book
Language:	Undetermined
Published:	London Taylor and Francis 2004
Subjects:	Tribology,Grinding and polishing
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Institutions:	Trung tâm Học liệu Trường Đại học Cần Thơ

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Tribology in chemical mechanical planarization

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