So, S. Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models.

So, Soon-Youl. Simulations of Capacitively Coupled Plasmas between Unequal-sized Powered and Grounded Electrodes Using One- and Two-dimensional Fluid Models.

So, Soon-Youl. Simulations of Capacitively Coupled Plasmas between Unequal-sized Powered and Grounded Electrodes Using One- and Two-dimensional Fluid Models.