Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Bibliografiset tiedot
Päätekijä:	So, Soon-Youl.
Aineistotyyppi:	Artikkeli
Kieli:	English
Aiheet:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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