Studies of 2.45 GHz microwave induced plasma abatement of CF4 /
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| Hlavní autor: | Radoiu, Marilena T. |
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| Médium: | Článek |
| Jazyk: | English |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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