Allen, D. T., Dyer, D. E., Kenig, G. A., Laurent, J., & Murphy, C. F. Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry.
Chicago Style citaatAllen, David T., David E. Dyer, George A. Kenig, Jean-Philippe Laurent, en Cynthia F. Murphy. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
MLA citatieAllen, David T., et al. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
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