Allen, D. T., Dyer, D. E., Kenig, G. A., Laurent, J., & Murphy, C. F. Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry.
Trích dẫn kiểu ChicagoAllen, David T., David E. Dyer, George A. Kenig, Jean-Philippe Laurent, và Cynthia F. Murphy. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
MLA citiranjeAllen, David T., et al. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
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