Allen, D. T., Dyer, D. E., Kenig, G. A., Laurent, J., & Murphy, C. F. Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry.

Allen, David T., David E. Dyer, George A. Kenig, Jean-Philippe Laurent, και Cynthia F. Murphy. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.

Allen, David T., et al. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.