Allen, D. T., Dyer, D. E., Kenig, G. A., Laurent, J., & Murphy, C. F. Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry.
Chicago Stili AlıntıAllen, David T., David E. Dyer, George A. Kenig, Jean-Philippe Laurent, ve Cynthia F. Murphy. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
MLA AlıntıAllen, David T., et al. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
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