Allen, D. T., Dyer, D. E., Kenig, G. A., Laurent, J., & Murphy, C. F. Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry.
Stile di citazione ChicagoAllen, David T., David E. Dyer, George A. Kenig, Jean-Philippe Laurent, e Cynthia F. Murphy. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
Citazione MLAAllen, David T., et al. Development of Parametric Material, Energy, Emission Inventories for Wafer Fabrication in the Semiconductor Industry.
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