Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry /

Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry /

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Bibliografische gegevens
Andere auteurs: Allen, David T., Dyer, David E., Kenig, George A., Laurent, Jean-Philippe., Murphy, Cynthia F.
Formaat: Artikel
Taal:English
Onderwerpen:
Electronics industry
Emissions inventory
Energy consumption
Microelectronic fabrication
Pollutant emission
Raw materials
Semiconductor materials
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