Carty, A. J., Chen, Y., Chi, Y., Lai, Y., Lee, G., Liu, C., & Peng, S. Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents.

Carty, Arthur J., Yao-Lun Chen, Yun Chi, Ying-Hui Lai, Gene-Hsiang Lee, Chao-Shiuan Liu, and Shie-Ming Peng. Deposition of Ru and RuO2 Thin Films Employing Dicarbonyl Bis-diketonate Ruthenium Complexes As CVD Source Reagents.

Carty, Arthur J., et al. Deposition of Ru and RuO2 Thin Films Employing Dicarbonyl Bis-diketonate Ruthenium Complexes As CVD Source Reagents.