Temperature-induced apparent mass changes observed during quartz crystal microbalance measurements of atomic layer deposition /

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Bibliografski detalji
Glavni autor:	Rocklein, M. N.
Daljnji autori:	George, S. M.
Format:	Članak
Jezik:	English
Teme:	Atomic layer method Cooling Mass difference Quartz microbalance Temperature effect
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Temperature-induced apparent mass changes observed during quartz crystal microbalance measurements of atomic layer deposition /

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