Grill, A. Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD.
Dyfyniad Arddull ChicagoGrill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.
Dyfyniad MLAGrill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.
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