APA citiranje

Grill, A. Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD.

Trích dẫn kiểu Chicago

Grill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.

MLA citiranje

Grill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.