APA Citation

Grill, A. Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD.

Chicago Style Citation

Grill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.

MLA Citation

Grill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.

Warning: These citations may not always be 100% accurate.