Grill, A. Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD.
Style de citation ChicagoGrill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.
Style de citation MLAGrill, Alfred. Porous PSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared By PECVD.
Attention : ces citations peuvent ne pas être correctes à 100%.