Stephen A. Campbell. (2001). The science and engineering of microelectronic fabrication. New York: Oxford University Press.
Παραπομπή Chicago StyleStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
Παραπομπή MLAStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
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