The science and engineering of microelectronic fabrication

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this se...

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Bibliographic Details
Main Author: Stephen A. Campbell
Language:Undetermined
English
Published: New York Oxford University Press 2001
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Institutions: Trung tâm Học liệu Trường Đại học Trà Vinh