Stephen A. Campbell. (2001). The science and engineering of microelectronic fabrication. New York: Oxford University Press.
Trích dẫn kiểu ChicagoStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
ציטוט MLAStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
אזהרה: ציטוטים אלה לעיתים לא מדויקים ב 100%.