Stephen A. Campbell. (2001). The science and engineering of microelectronic fabrication. New York: Oxford University Press.
Style de citation ChicagoStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
Style de citation MLAStephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.
Attention : ces citations peuvent ne pas être correctes à 100%.