The science and engineering of microelectronic fabrication
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...
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| שפה: | Undetermined English |
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New York
Oxford University Press
2001
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הוספת תג
אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Trà Vinh |
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