The science and engineering of microelectronic fabrication

This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...

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Bibliographic Details
Main Author: Stephen A. Campbell
Language:Undetermined
English
Published: New York Oxford University Press 2001
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Institutions: Trung tâm Học liệu Trường Đại học Trà Vinh