Cita APA

Stephen A. Campbell, & Stephen A. Campbell. (2001). The science and engineering of microelectronic fabrication. New York: Oxford University Press.

Chicago Style Citation

Stephen A. Campbell, i Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.

Cita MLA

Stephen A. Campbell, i Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.