APA aipamena

Stephen A. Campbell, & Stephen A. Campbell. (2001). The science and engineering of microelectronic fabrication. New York: Oxford University Press.

Chicago Style aipamena

Stephen A. Campbell, và Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.

MLA aipamena

Stephen A. Campbell, và Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 2001.