The science and engineering of microelectronic fabrication

Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture...

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主要作者: Stephen A. Campbell
其他作者: Stephen A. Campbell.
语言:Undetermined
English
出版: New York Oxford University Press 2001
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Trà Vinh