The science and engineering of microelectronic fabrication
Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture...
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| Language: | Undetermined English |
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New York
Oxford University Press
2001
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| Institutions: | Trung tâm Học liệu Trường Đại học Trà Vinh |
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