The science and engineering of microelectronic fabrication

Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture...

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Autor principal: Stephen A. Campbell
Outros Autores: Stephen A. Campbell.
Idioma:Undetermined
English
Publicado em: New York Oxford University Press 2001
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Trà Vinh