The science and engineering of microelectronic fabrication

Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture...

Szczegółowa specyfikacja

Zapisane w:
Opis bibliograficzny
1. autor: Stephen A. Campbell
Kolejni autorzy: Stephen A. Campbell.
Język:Undetermined
English
Wydane: New York Oxford University Press 2001
Hasła przedmiotowe:
Etykiety: Dodaj etykietę
Nie ma etykietki, Dołącz pierwszą etykiete!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Trà Vinh