Micro system design

مواد مشابهة

• The development of microelectromechanical systems :
  منشور في: (1993)
•  Multi-wafer rotating MEMS machines : turbines, generators, and engines
  منشور في: (2010)
• Modeling and control of nonlinear micro-distributed systems /
  بواسطة: Wang, P. K. C.
• JTEC panel report on microelectromechanical systems in Japan
  منشور في: (1994)
• Mechanical design of microresonators : modeling and applications /
  بواسطة: Lobontiu, Nicolae.
  منشور في: (2006)