Instrumentation for Measurement of the Energy Distribution of the RF Implanter
A microbeam production using the RF implanter at PEFP is in progress for research in material science. For this purpose, the energy spread of the beam less than 1% is required. A beam focusing system with a triplet quardrupole has been adopted. In order to measure the energy spread, we have dev...
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| 格式: | Conference object |
| 語言: | Vietnamese |
| 出版: |
2023
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| 在線閱讀: | http://scholar.dlu.edu.vn/handle/123456789/1662 https://www.kns.org/files/pre_paper/7/536Tu%20Anh%20Trinh.pdf |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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